Displacement Sensor - interferometer with nanometer accuracy
Two-color heterodyne laser interferometry for long-distance stage measurement with correction of uncertainties in measured optical distances | Scientific Reports
Distance Measuring Interferometry – The Art of Fringe Counting
Sensors for Displacement & Absolute Position Measurement | ZYGO
Laser heterodyne interferometer system for measurement and control of... | Download Scientific Diagram
Laser Interferometer Measurement System SJ6000 - Chotest Technology Inc. -Thread measuring machine
High-speed laser interferometric distance sensor with reference mirror oscillating at ultrasonic frequencies